Products
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OTHER
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RTC CHUCK P3
EBR CHUCK P3
GROUND STRAP
YAC 4.5G BOTTOM ELECTRODE
General Information
Product | YAC | Material | Aluminum |
---|---|---|---|
Maker | MECARO | Process Temp | ~60¡É |
Treatment | Anodizing | Uniformity | - |
Process | Dry Etcher | Leak rate | < 1X10-8 |