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OTHER

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  • HDP Side Coil
  • Ground Shield ring
  • Cp-Zr
  • HEATING SHOWER HEAD

HDP Side Coil

General Information
Product HDP Side Coil Material Cu
Maker MECARO Process Temp ~ 135˚c
Leak rate - Uniformity  
Process HDP-PROCESS -  

Ground Shield ring

General Information
Product ULTIMA Material Aluminum
Maker MECARO Process Temp ~ 135˚c
Leak rate - Uniformity  
Process HDP-PROCESS -  

Ground Shield ring

General Information
Product Cyclone Plus Material Aluminum
Maker MECARO Process Temp ~ 185˚c
Treatment Anodizing Uniformity > 1%
Process Cp-Zr Leak rate < 1X10-8

Ultima Side Coil

General Information
Product - Material Aluminum
Maker - Process Temp ~ 180˚c
Treatment Anodizing Uniformity < 1%
Process Oxide Leak rate < 1X10-8