System sector
This is the product to maintain the best process condition, heating wafer of semiconductor process or glass of LCD process evenly in the temperature as wanted and SYSTEM to chuck PURGE GAS SYSTEMand WAFER for process condition being provided.
Chemical sector
Precursor for sputtering is the special chemical product being used in MOCVD,ALD process/For semiconductor : Mass production products such as TEOS, TEB, TEPO etc
and ZrO2, TIN, Al203 etc.