home_Products_system division_Semiconductor_CVD

CVD

We will reward consumers with the best quality.

  • Forged DxZ 6"
  • Forged DxZ 8"
  • Atto 8"
  • Atto 12"
  • Vector 12" First
  • Vector 12" Normal
  • Vector 12" First
    AIF Coating Type
  • Vector 12" Normal
    AIF Coating Type

Forged DxZ 6"

FORGED DxZ 6”(TOP)
FORGED DxZ 6”(BOTTOM)
General Information
Equipment P-5000 Material Aluminum
Maker AMAT Process Temp ~ 485˚c
Treatment Anodizing, Bead blast Uniformity <1%
Process PE-TEOS,BPSG,PSG,USG Leak rate < 1X10-8

Forged DxZ 8"

FORGED DxZ 8”(TOP)
FORGED DxZ 8”(BOTTOM)
General Information
Equipment P-5000 Material Aluminum
Maker AMAT Process Temp ~ 485˚c
Treatment Anodizing, Bead blast Uniformity <1%
Process PE-TEOS,BPSG,PSG,USG Leak rate < 1X10-8

Atto 8"

Atto 8" (TOP)
Atto 8" (BOTTOM)
General Information
Equipment ATTO Material Aluminum
Maker ATTO Process Temp ~ 470˚c
Treatment FCCC Uniformity <1%
Process PE-CVD Leak rate < 1X10-8

Atto 12"

Atto 12" (TOP)
Atto 12" (BOTTOM)
General Information
Equipment ATTO Material Aluminum
Maker ATTO Process Temp ~ 470˚c
Treatment FCCC Uniformity <1%
Process PE-CVD Leak rate < 1X10-8

Vector 12” First

Vector 12” First (TOP)
Vector 12” First (BOTTOM)
General Information
Equipment VECTOR Material Aluminum
Maker NOVELLUS Process Temp ~ 470˚c
Treatment Bare Uniformity <1%
Process PE-CVD Leak rate < 1X10-8

Vector 12” Normal

Vector 12” Normal (TOP)
Vector 12” Normal (BOTTOM)
General Information
Equipment VECTOR Material Aluminum
Maker NOVELLUS Process Temp ~ 470˚c
Treatment Bare Uniformity <1%
Process PE-CVD Leak rate < 1X10-8

Vector 12” First (AIF Coating Type)

Vector 12” First (AIF Coating Type) (TOP)
Vector 12” First (AIF Coating Type) (BOTTOM)
General Information
Equipment VECTOR Material Aluminum
Maker NOVELLUS Process Temp ~ 470˚c
Treatment AlF coating Uniformity <1%
Process PE-CVD Leak rate < 1X10-8

Vector 12” Normal (AIF Coating Type)

Vector 12” Normal (AIF Coating Type) (TOP)
Vector 12” Normal (AIF Coating Type) (BOTTOM)
General Information
Equipment VECTOR Material Aluminum
Maker NOVELLUS Process Temp ~ 470˚c
Treatment AlF coating Uniformity <1%
Process PE-CVD Leak rate < 1X10-8