Products
_Products_system division_Semiconductor_CVD
CVD
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Forged DxZ 6"
- FORGED DxZ 6¡±(TOP)
- FORGED DxZ 6¡±(BOTTOM)
General Information
Product | Forged DxZ 6" | Material | Aluminum |
---|---|---|---|
Maker | MECARO | Process Temp | ~ 485¢ªc |
Treatment | Anodizing, Bead blast | Uniformity | <1% |
Process | PE-TEOS,BPSG,PSG,USG | Leak rate | < 1X10-8 |
Forged DxZ 8"
- FORGED DxZ 8¡±(TOP)
- FORGED DxZ 8¡±(BOTTOM)
General Information
Product | Forged DxZ 8" | Material | Aluminum |
---|---|---|---|
Maker | MECARO | Process Temp | ~ 485¢ªc |
Treatment | Anodizing, Bead blast | Uniformity | <1% |
Process | PE-TEOS,BPSG,PSG,USG | Leak rate | < 1X10-8 |
Atto 8"
- Atto 8" (TOP)
- Atto 8" (BOTTOM)
General Information
Product | ATTO | Material | Aluminum |
---|---|---|---|
Maker | MECARO | Process Temp | ~ 470¢ªc |
Treatment | FCCC | Uniformity | <1% |
Process | PE-CVD | Leak rate | < 1X10-8 |
Atto 12"
- Atto 12" (TOP)
- Atto 12" (BOTTOM)
General Information
Product | ATTO | Material | Aluminum |
---|---|---|---|
Maker | MECARO | Process Temp | ~ 470¢ªc |
Treatment | FCCC | Uniformity | <1% |
Process | PE-CVD | Leak rate | < 1X10-8 |
CVD Heater 12¡± First
- CVD Heater 12¡± First (TOP)
- CVD Heater 12¡± First (BOTTOM)
General Information
Product | CVD Heater 12¡± First | Material | Aluminum |
---|---|---|---|
Maker | MECARO | Process Temp | ~ 470¢ªc |
Treatment | Bare | Uniformity | <1% |
Process | PE-CVD | Leak rate | < 1X10-8 |
CVD Heater 12¡± Normal
- CVD Heater 12¡± Normal (TOP)
- CVD Heater 12¡± Normal (BOTTOM)
General Information
Product | CVD Heater 12¡± Normal | Material | Aluminum |
---|---|---|---|
Maker | MECARO | Process Temp | ~ 470¢ªc |
Treatment | Bare | Uniformity | <1% |
Process | PE-CVD | Leak rate | < 1X10-8 |
CVD Heater 12¡± First (AIF Coating Type)
- CVD Heater 12¡± First (AIF Coating Type) (TOP)
- CVD Heater 12¡± First (AIF Coating Type) (BOTTOM)
General Information
Product | CVD Heater 12¡± First | Material | Aluminum |
---|---|---|---|
Maker | MECARO | Process Temp | ~ 470¢ªc |
Treatment | AlF coating | Uniformity | <1% |
Process | PE-CVD | Leak rate | < 1X10-8 |
CVD Heater 12¡± Normal (AIF Coating Type)
- CVD Heater 12¡± Normal (AIF Coating Type) (TOP)
- CVD Heater 12¡± Normal (AIF Coating Type) (BOTTOM)
General Information
Product | CVD Heater 12¡± Normal | Material | Aluminum |
---|---|---|---|
Maker | MECARO | Process Temp | ~ 470¢ªc |
Treatment | AlF coating | Uniformity | <1% |
Process | PE-CVD | Leak rate | < 1X10-8 |