제품소개
_제품소개_시스템사업부_LCD_OTHER
OTHER
최고의 품질로 수요자 여러분께 보답하겠습니다.
- RTC CHUCK P3
- EBR CHUCK P3
- GROUND STRAP
- YAC 4.5G BOTTOM ELECTRODE
RTC CHUCK P3
EBR CHUCK P3
GROUND STRAP
YAC 4.5G BOTTOM ELECTRODE
General Information
| Product | YAC | Material | Aluminum |
|---|---|---|---|
| Maker | MECARO | Process Temp | ~60℃ |
| Treatment | Anodizing | Uniformity | - |
| Process | Dry Etcher | Leak rate | < 1X10-8 |
